Used KLA / TENCOR 5100 #293603716 for sale

KLA / TENCOR 5100 is a non-contact optical wafer testing and metrology equipment. It provides high precision, high speed, accurate and comprehensive coverage of device parameters such as critical dimensions, defects, and overlay targets. The system is designed for use in semiconductor, photonics, and MEMS devices. KLA 5100 features a power-driven, point-of-contact mounting with an integrated flat-panel display and a motorized platform, enabling it to move from the edge to the center of wafers up to 300mm in size. Its advanced optical unit is capable of providing single-axis, double-axis, and three-axis imaging capabilities, as well as a wide range of typical and custom measurement and analysis features. This machine is also equipped with a variety of automated features to improve productivity and optimize accuracy. These features include automatic focus and alignment, automatic defect detection, automatic contrast optimization and scanning strategies, automatic overlay registration, and automatic process optimization. TENCOR 5100's advanced metrology capabilities include imaging and measuring over patterned wafers, device edges, device corners, and find-fail tests. Specialty techniques such as air bearing scan, closed-loop pattern positioning and measurement, and embedded die inspection are also available. High-speed scanning capability is available to provide more efficient throughput, while advanced algorithms can improve wafer inspection performance. 5100 is equally adept at defect review and analysis. It is capable of supporting a wide range of fault analysis options, including change detection, total defect mapping and classification, defect clustering, and hotspot analysis. Overall, KLA / TENCOR 5100 provides the latest features for highly precise and reliable wafer testing and metrology, enabling users to maximize their yield, improve product performance and reliability, and reduce waste and scrap.