Used KLA / TENCOR 5100 #293619673 for sale

KLA / TENCOR 5100
ID: 293619673
Overlay inspection system.
KLA / TENCOR 5100 is a next-generation wafer testing and metrology equipment that provides a full range of metrology and testing applications for a variety of wafer substrates. The system is equipped with a 300 mm loaded robotics unit, enabling quick and easy loading and unloading of wafers. The machine is also capable of handling wafer sizes ranging from 200mm to 300mm and can handle both production and R&D applications. KLA 5100 utilizes advanced tool control, which enables efficient operation with high throughputs. The tool is designed to meet the needs of high-volume semiconductor manufacturers and is designed to offer advanced yield management and optimization. The asset is capable of testing and measuring various physical, electrical, chemical, and mechanical properties of wafers, including parameters such as curvature, flatness, stress, and thickness. The model uses a number of non-destructive testing techniques such as X-ray diffraction, ellipsometry, and micro-viscometry. It also uses a range of other relative and absolute tests including atomic force microscopy, electron beam inspection, and thermal properties measurement. TENCOR 5100 is equipped with a live imaging equipment that offers full-view test coverage of the wafer and advanced image-processing capabilities. This system supports both one-dimensional and two-dimensional pattern recognition. The unit also features a high-resolution scan head and chamber, giving the user the ability to view the same area up to five times higher in resolution. The machine is designed to improve throughput by utilizing automated sample positioning, automated sample handling and automated tactile feedback. This allows for rapid testing of wafers for fast turnaround times. The tool also enables multi-application testing for advanced yield management. 5100 is equipped with an array of leading software applications that provide multi-platform, multi-vendor development and testing capability. This feature allows users to customize their test program and rapidly analyze the results. It also provides seamless integration of test data from various platforms. All software applications used in the asset are compatible with existing hardware and client systems, ensuring quick and easy customization. Overall, KLA / TENCOR 5100 is an advanced wafer testing and metrology model that provides a range of test and measurement capabilities for a variety of wafer substrates. It is an ideal tool for high volume semiconductor manufacturers who need to remove defects quickly and accurately. The equipment enables efficient testing and data analysis, allowing test results to be reported quickly. Additionally, its advanced software applications enable easy customization and interoperability with existing hardware and client systems.
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