Used KLA / TENCOR 5100 #293630321 for sale

KLA / TENCOR 5100 is a wafer testing and metrology equipment engineered to measure critical device dimensions on bare and patterned wafers for semiconductor production, research and development. It utilizes advanced imaging techniques to capture surface topography data of the sample, in addition to a range of spectroscopic techniques and high-speed optical inspection to obtain in-die/on-wafer results. KLA 5100 operates in a non-destructive, non-contact fashion, utilizing high-resolution imaging technology that yields accurate, repeatable measurement results while placing minimal stress on the material. This system offers true eight-inch aperture scanning, a larger field of view than standard optical microscope technologies, enabling the capture of more data in fewer inspection cycles. Its high-speed optical Inspection capability helps accelerate product development and yield Ramp up efforts. By analyzing both wafer and die level data, TENCOR 5100 provides fast characterization of wafer materials, features, defects, test dice, and die-to-die uniformity. Additionally, its in-die metrology capabilities enable localized characterization of die structures to evaluate functionality. The unit is equipped with a patented pattern recognition engine for automated feature extraction and analysis. This engine processes images of devices or polygons, extracting a variety of metrology data related to their physical size, shape and positioning. Its powerful particle analysis tools support research efforts, detecting particles and other hard to find features using advanced anomaly detection algorithms. 5100 can be customised to meet specific customer requirements, supporting a wide range of sample environments and applications. The free standing machine is well suited to wafer sort, engineering, academic and research labs. In addition, it can be integrated into existing production process lines, as part of an automated or manual process. The combination of KLA / TENCOR 5100's non-destructive, high-speed imaging and data analysis capabilities, plus its versatile, compact design make it an ideal choice for cutting-edge wafer testing and metrology. The tool provides accurate, actionable data to reduce cycle times and lower costs—enabling state-of-the-art semiconductor research and production applications.