Used KLA / TENCOR 5100 #293630446 for sale

ID: 293630446
Overlay measurement and inspection system Spares included.
KLA / TENCOR 5100 is a wafer testing and metrology system designed for high throughput wafer inspection and metrology. Its superior design and features enable faster, more accurate data collection and analysis while reducing cycle times, throughput and cost. KLA 5100 utilizes advanced vision, automation, and sensing technologies to quickly inspect and analyze wafer surfaces. It uses various imaging techniques, including laser-assisted scanning, polarization contrast microscopy, 3D optical imaging, and spectral reflectance imaging, to measure wafer features and defects. TENCOR 5100 features a full range of high-speed wafer handling options, including automatic wafer loaders, unloaders, orienters, and sorters. The system supports up to 8 purpose specific tools and has advanced digital cross-correlation capabilities for fast, accurate array analysis. 5100 provides fast, accurate metrology measurements, including particle count, surface charge, surface roughness, nanoindentation, wafer mapping, and surface bond tests. It is designed to quickly identify and classify critical defects and slips with high repeatability. The flexibility of the system enables a variety of user definable operations, such as matching, analyzing, sorting and conducting on-wafer tests. KLA / TENCOR 5100's unique capabilities include automatic process control, advanced analysis, data collection, wafer tracking, and process identification. It provides qualitative and quantitative data for process development, characterization, and production. KLA 5100 offers a comprehensive suite of data analysis tools for quickly and accurately correlating defect locations on wafers. TENCOR 5100 is an invaluable tool in the semiconductor industry. Its advanced technology and user-friendly interface make it a reliable, cost-effective solution for high throughput wafer inspection and metrology. It delivers fast, accurate results and a high level of throughput and flexibility, while also reducing cycle times.
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