Used KLA / TENCOR 5100 #293664945 for sale

KLA / TENCOR 5100 is an advanced wafer testing and metrology equipment used across the electronics industry. It enables precision wafer inspection and metrology with reliable and repeatable results. This system consists of a powerful high-resolution microscopy stage and multiple physical property evaluation tools integrated with software for automated and intelligent data analysis. KLA 5100 unit features an automated wafer handling machine and a vertical-field scanning electron microscope imaging tool. The automated wafer handler ensures precise and repeatable wafer positioning and orientation with micrometer precision. This scanning electron microscope imaging asset offers superior resolution, high repeatability, and a wide field of view for accurate metrology of wafers. The physical property evaluation tools of TENCOR 5100 model include laser profilometry, static and dynamic imaging, defect monitoring, and focus on flat measurements. Laser profilometry technology, which is a scanning technology for 3D profiling and measurement of material surfaces, offers the highest depth resolution for topography, thickness, roughness, height, and particle sizing analysis. The static and dynamic imaging technologies provide additional image analysis capabilities for pattern recognition, defect classification, and multi-layer wafer monitoring to improve yield and reduce failures. The defect monitoring feature also performs rapid and accurate defect characterization using targeted imaging to identify and sort defect features such as line expulsions and resistivity shifts. The focus on flat measurements enable precise thickness or flatness measurements of a wafer for production quality control. The adjustable focus inclusions provide specialized measurement of feature sizes and shapes. It also has a memory-management equipment that stores the data collected by the imaging and metrology components. The advanced software integrated in 5100 system provides automated algorithms that can analyze images and properties with higher speed and accuracy than manual inspections. It also offers an intuitive user interface optimized for wafer measurement applications, with powerful real-time analysis capabilities and data visualization tools. This integrated software suite is designed for efficient data analysis, semi-automatic optimization of process parameters, and recipe-based optimization of process recipes. In summary, KLA / TENCOR 5100 is an advanced wafer testing and metrology unit that offers precision wafer inspection and metrology with reliable and repeatable results. With its powerful high-resolution microscopy stage, multiple physical property evaluation tools, and an integrated software suite, it provides advanced capabilities for rapid and accurate defect characterization, topography evaluation, production quality control, and recipe optimization.