Used KLA / TENCOR 5100 #293767084 for sale

KLA / TENCOR 5100 is an advanced wafer testing and metrology equipment capable of delivering comprehensive defect review, defect classification, process control, and production yield information. It utilizes an advanced, high resolution optical imaging system capable of capturing and inspecting wafers at the sub-micron level. The installed unit is a fully automated, single-wafer inspection platform that is capable of inspecting up to 156 mm wafer diameters. The machine features a mechanical wafer handling tool that allows for accurate and reliable wafer movement, while the asset's automated optical beam control ensures high-performance image capture. KLA 5100 supports both brightfield and darkfield imaging modes, allowing for the detection of both large and small defects. The model's high-definition imaging equipment captures images of all types of defects, from scratch or particulate contamination to focus, line width, and overlay errors. The system's productivity and performance metrics are managed by an advanced data analysis software. The unit can generate high-resolution defect map views from multiple images and accurately characterize defects based on size, shape, position, and contrast. It also features an automated autofocus adjustment that can improve imaging performance over time and reduce data collection time. TENCOR 5100 allows for direct integration with other process control and monitoring tools including software-based rules and analysis tools such as defect classification systems and pattern recognition systems. It can also be connected to local or remote databases allowing for easy data sharing and remote monitoring capabilities. Overall, 5100 is an easy-to-use, high-speed automated wafer testing and metrology machine that allows for accurate and comprehensive defect review, defect classification, process control, and production yield data. Its advanced optical tool coupled with powerful data analysis capabilities make it a cost-effective solution to improve yield and process safety.