Used KLA / TENCOR 5100 #9236398 for sale

KLA / TENCOR 5100 is a high performance wafer testing/metrology equipment designed for advanced manufacturing and R&D facilities. The system is a reconfigurable platform with multiple testing and metrology options that allow users to customize it to their needs. The core of KLA 5100 consists of a large field-of-view digital camera, which captures images of the entire front or backside of each wafer. These images can then be analyzed using a suite of advanced machine vision algorithms to detect a variety of defects, such as particles and scratches. Additionally, the unit can measure critical wafer process results such as lithography line widths, layer thicknesses, and die sizes. TENCOR 5100 provides users with high speed throughput, accurate results, and ease of use. It features a compact, modular design that requires minimal space for installation. The machine uses a light source to back-illuminate the entire wafer, enabling the detection of defects that are less than a micron in size. It employs a state-of-the-art CCD camera, which is four times faster than the cameras of previous systems. 5100 incorporates several automated processes, including integrated calibration, drift correction, inspection recipes, reporting, histogram generation, and data transfer. KLA / TENCOR 5100 supports up to four inspection tasks simultaneously, allowing multiple different types of evaluation to be performed simultaneously. Furthermore, the tool is capable of inspecting multiple substrates or panel sizes at the same time. With its advanced pattern matching algorithms, KLA 5100 can be used to effectively detect damage, such as scratches, punctures and contaminants, on wafer surfaces. In addition, it offers defect classification and contrast control for measuring feature parameters and for ridge and sidewall information. Overall, TENCOR 5100 is an industry-leading wafer testing/metrology asset that provides high speed, high accuracy, robust, and repeatable results. It offers multiple inspection and metrology options to meet various customer needs. With its flexible design, users can easily customize it for diverse product inspection and metrology tasks. As a result, 5100 can be an invaluable tool for advanced production and R&D facilities.