Used KLA / TENCOR 5100 #9236713 for sale

KLA / TENCOR 5100
ID: 9236713
Wafer Size: 6"
Inspection system, 6".
KLA / TENCOR 5100 is a high-performance wafer testing and metrology equipment, designed to meet the needs of the semiconductor fabrication industry. Its advanced optical technology, high-speed operation, wide range of capabilities, and automated operation make it an ideal solution for both production and research laboratories. KLA 5100 features an automated optical inspection system, capable of automatically scanning wafers for any defects. Its optical head combines two laser diodes, a imaging unit and two different substrate angles, allowing for 3D inspection of the wafer surface. This machine is capable of detecting defects on the micron scale, and can execute up to 4 measurements per second. TENCOR 5100 also includes advanced metrology tools and capabilities. It can measure dry film levels of up to 25 microns and profile up to 50 microns. It can also perform overlay measurements of up to +/-2 microns. Additionally, this tool can measure resistivity and film thickness of up to 40 nanometers. In terms of its operation and automation, 5100 is equipped with an integrated Wafer-Probe station, allowing it to control wafers with an accuracy of up to 1 micron. Additionally, this asset is capable of automatically loading and unloading wafers, eliminating user-intervention. KLA / TENCOR 5100 can also be remote-controlled and programmed, allowing for easier operation and more efficient processing of wafers. This model integrates with most industry-standard processing tools and can be used with various host computer systems. Overall, KLA 5100 is an advanced and efficient solution for wafer testing and metrology needs. With its range of features, high speed operation, and automated tasks, this equipment is an ideal choice for any semiconductor fabrication facility.
There are no reviews yet