Used KLA / TENCOR 5100 #9293246 for sale

KLA / TENCOR 5100
ID: 9293246
Inspection system.
KLA / TENCOR 5100 is a wafer testing and metrology equipment designed to improve the production of high-purity substrates for the semiconductor industry. This advanced automated system implements a series of processes and systems designed to accurately measure and assess the purity of a substrate. KLA 5100 unit uses laser-assisted scanning systems to ensure high-precision measurements of the features of a substrate. Additionally, it has an advanced non-destructive testing machine that uses an electron beam to detect features as small as 10 nanometers. The tool features automated calibration to guarantee accuracy of measurement and accuracy of the test results. Another feature of TENCOR 5100 asset is a proprietary defect detection model that utilizes the combination of AOI tools and advanced defect inspection algorithms to detect process anomalies. The equipment can also track multiple substrates simultaneously, ensuring the accuracy of the delivered results. To optimize system performance, 5100 implements a Dynamically Reconfigurable Automation (DRA) platform that enables rapid and efficient changes in test recipes. This platform also allows users to adjust test conditions in order to meet process needs by specifying different sizes and amount of test data. Additionally, the unit supports a wide range of interfaces, including on-site control of the machine via Ethernet or USB. In addition, KLA / TENCOR 5100 tool is also designed for high resolution imaging. The asset provides high-resolution images of substrates in standard reflective, metrology, or dark field illumination modes. It also supports scanning in CCD format or in a 5000 pixel series. Furthermore, its image processing capabilities allow for stitching of multiple images and their stitching onto a single vision target. To improve dust and contamination sensitivity, the model includes a dual-level particle identification, which allows for accurate identification and categorization of particles. The equipment also has a multi-axis stage which provides a flexible inspection route, and is equipped with an automated loss of attitude and process control system. Overall, KLA 5100 unit provides sophisticated metrology and defect detection capabilities, combined with automated calibration, optimizing its performance for high-purity substrate production. Its advanced imaging and particle identification systems makes it a powerful choice for the high-end semiconductor industry.
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