Used KLA / TENCOR 5100 #9351407 for sale

KLA / TENCOR 5100 wafer testing and metrology equipment is a versatile platform designed to provide quality control and process control within the microelectronic circuit manufacturing industry. The system is equipped with state-of-the-art optics for accurate measurement of critical dimensions and feature sizes on wafers. It incorporates an automated metrology module to quickly analyze complex patterns within wafers at high resolution, delivering high throughput and reliable process control. KLA 5100 employs an automated optical microscopy unit for inspecting patterns on a variety of substrates, including plasma etch developed wafers and resist layers. It features a high resolution detector and sophisticated software for identifying small defects like pits and voids, as well as precise microscale measurements. A Micro-Electro-Mechanical Machine (MEMS) test heads on the tool allow for quick, accurate probing and testing of electrical signals on specific samples on wafers. This MEMS technology is used to accurately measure the functionality and electrical properties of integrated circuits. TENCOR 5100 also features a multi-sensor asset to measure the thickness, reflectivity, and topography of wafer surfaces, along with a chemical-mechanical polishing (CMP) option which tests the uniformity of surfaces created by chemical-mechanical polishing techniques. In addition, the model incorporates an optical scatterometer to measure the uniformity of layer thicknesses, and a Non-Uniformity-of-Surface Measurement (NUSM) tool to analyze microscopic irregularities on the surface of the wafer. 5100 is capable of testing wafers across a range of dimensions, from less than 1 mm to a maximum of 450 mm. In terms of data analysis, the equipment can be used to create process control charts and values to measure the process stability over time. In addition, the system provides an intuitive user interface which is ideal for developing research and development applications within the semiconductor industry. KLA / TENCOR 5100 wafer testing and metrology unit is a versatile platform that is designed to deliver high throughput, accurate measurement, and reliable process control for the semiconductor industry. It incorporates a variety of state-of-the-art technology for analyzing intricate patterns and electrical properties on wafers, and for providing quantitative data that is necessary for process control. The machine is capable of measuring wafer dimensions from less than 1 mm to 450 mm, making it an ideal choice for analyzing a wide variety of substrates.