Used KLA / TENCOR 5100 #9361599 for sale

KLA / TENCOR 5100 is a top-of-the-line wafer testing and metrology equipment. Its advanced opto-mechanical design provides flexible and precise positioning, allowing it to accurately measure and inspect wafers up to 200mm in diameter. The system is engineered to provide high throughput with a maximum wafer cycle time of 13.2 seconds. KLA 5100's imaging unit includes a digital camera, lens, and optics to capture detailed images for defect and feature analysis. The machine incorporates advanced defect inspection software to evaluate defects such as particles, bridging and voids at resolutions of 1µm. It also enables users to perform defect-classification and defect-tracking, and visualize events down to 0.1µm. TENCOR 5100 is equipped with an advanced laser interferometer measuring tool. It utilizes a narrow laser beam to scan the entire wafer at 1kHZ, providing resolution higher than 0.1 nm for single point measurements. Data can be used for overlay calibration, 3D topography measurements and a variety of other metrology tasks such as deformation, critical dimension, and overlay patterns. 5100 asset also includes a substrate handler module, allowing automated loading and unloading of wafers. The model can track successful loads and verifies that all wafers reach their destination. It also offers wafer ID tracking, data logging and analytics, and secure database access. With these features, users can monitor their production and ensure quality and traceability. KLA / TENCOR 5100 uses an intuitive user interface for operation. It supports multiple languages (English, Chinese, Japanese, Korean, and Russian) making it easier to use in an international setting. The equipment can also integrate with third-party applications and databases allowing for flexible customization and analysis. KLA 5100 System is an advanced wafer testing and metrology tool. It delivers industry-leading resolution and speed, while making it easier to monitor and trace wafer production. Its flexible opto-mechanical design, advanced imaging and laser interferometer capabilities, automated handling, intuitive user interface, and secure database access make it the ideal choice for any semiconductor producer seeking maximum quality assurance and verification.