Used KLA / TENCOR 5105 #293592897 for sale

KLA / TENCOR 5105 is a wafer testing and metrology equipment designed for advanced wafer production and process control. It is based on KLA proven 1D and 2D inspection and metrology technology, and incorporates a new 300mm optical microscopy system with self-calibration capabilities to improve throughput, enhance accuracy and boost productivity. The unit offers 2D geometry alignment metrology with automated pattern recognition and a unique focus architecture. KLA 5105 provides improved line width measurement accuracy and reduced measurement ranges, enabling effective line width control. Additionally, the machine is able to detect and analyze wafer defects such as voids, scratches, and particulate matter. TENCOR 5105 employs TENCOR innovative Confocal Scanning Technology to ensure accurate and repeatable measurements while reducing data collection times and associated costs. The tool is capable of performing 48 measurement points in one complete scan, resulting in greater throughput and higher final yields. The integrated image processing algorithms also allow for improved particle analysis. With its advanced low kV asset, 5105 is optimized for 200mm wafers and capable of 100 micron resolution for accurate particle size measurements. This feature further increases yield by quickly and efficiently identifying critical defects. Using its powerful OpticsFaber 4.2 software, KLA / TENCOR 5105 is specially designed to analyze both a single wafer and full-panel sequences in a short time. The model is equipped with a built-in real-time CMP monitor and a defect classification equipment that precisely classifies and measures resistive open defects. Overall, KLA 5105 is an ideal option for wafer testing and metrology, offering improved speed, accuracy, throughput and precision. It also enables increased process control and yield optimization. The system is an invaluable tool for monitoring and analyzing critical defects, reducing cycle times and achieving higher yields.