Used KLA / TENCOR 5105 #9117501 for sale

ID: 9117501
Inspection system.
KLA / TENCOR 5105 is a highly advanced wafer testing and metrology equipment designed for precision performance and accuracy. It provides the most reliable and comprehensive reporting of a wide range of metrological features on individual wafer maps. The system is capable of measuring parameters such as film stress, topography, electrical properties, various DVD parameters, critical dimension, overlay, depth profile, sidewall angle, surface roughness, and 3D height images. Its advanced software solutions allow multiple technology levels to be reviewed, taking into consideration the start-of-line and end-of-line requirements for each module. The unit is built with a large measurement zone, capable of accommodating multiple wafers up to 3 inches in diameter. The machine is designed for concurrent measurements of up to 16 wafers simultaneously, allowing the user to collect data with maximum throughput and yield. KLA 5105 tool is equipped with advanced dot metrology, which provides high accuracy and repeatability. It is capable of detecting line width and space, height differences, topography, and more with a high level of accuracy. The asset's patented scanning frames ensure fast and accurate measurement. The model features a modular configuration, enabling the user to select the best configuration for their monitoring requirement. The user can choose from advanced features such as manual and automated options for wafer load and unload, automated re-measurement operations, and expert advice on defect analysis. TENCOR 5105 equipment is designed with user safety in mind. It is equipped with a triple-redundant safety system to protect against accidental contact with critical parts. The unit is also compliant with all local and international safety regulations. The machine features a simple, user-friendly interface with intuitive menus, allowing the user to easily navigate through the available features. It is backed by KLA extensive service and support network, providing the assurance of dependable performance.
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