Used KLA / TENCOR 5107 #293628543 for sale

KLA / TENCOR 5107
ID: 293628543
Inspection system.
KLA / TENCOR 5107 wafer testing and metrology equipment is an innovative tool that combines automated optical and surface metrology technology with precision wafer testing. KLA 5107 utilizes a high-accuracy digital camera, precision stage, and integrated optical imaging and processing algorithms to enable image-based surface inspection and analysis capabilities. TENCOR 5107 features advanced image processing algorithms that allow unprecedented levels of data granularity when analyzing a wafer's surface. The system is capable of identifying micro-defects, surface texture and shape measurements, as well as ultra-sensitive wafer process-related variations. This level of accuracy enables 5107 to identify process issues that have the potential to significantly affect the overall quality of the finished product. KLA / TENCOR 5107 also offers fast, repeatable metrology resolution of up to 0.1 micron, as well as a field-of-view of up to ∼5mm x 5mm. This allows for a wide range of wafer sizes and geometries to be tested and evaluated. In addition, KLA 5107 integrates with other systems for additional integrated process control and data synchronization. This integration allows for the unit to continuously monitor and update results in real-time. TENCOR 5107 is designed for use on production lines and in R&D laboratories. Increasingly, both industries require accurate, repeatable, and consistent measurements of wafer quality, and 5107 delivers all of this in a single, high-performance machine. The combination of speed, accuracy, and reliability make KLA / TENCOR 5107 the ideal tool for wafer metrology and testing. Overall, KLA 5107 wafer testing and metrology asset offers a revolutionary solution for manufacturers and research laboratories alike who desire fast and accurate measurements of wafer quality. By combing innovative optical and surface metrology technology that offer improved data granularity, field-of-view, process integration, and repeatable metrology, TENCOR 5107 has set a new standard for automated wafer metrology and testing.
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