Used KLA / TENCOR 5107 #9105810 for sale
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Wafer Size: 12"
Overlay Inspection System, 12", Parts System Electrical components: removed Includes granite rock flotation cable Input: 1Ø, 220VAC, 50/60Hz, 2.4/5A Schematics Diag: 002461-000 CE Marked 2002 vintage.
KLA / TENCOR 5107 is a wafer testing and metrology equipment that is used in the semiconductor industry. It is designed to accurately measure, inspect, characterize, and analyze wafers containing both semiconductor and MEMS devices. This system employs a range of precision optics, sensors and imaging systems which enable it to analyze a variety of die sizes and application spaces. The main component of KLA 5107 is its high-precision XY stage, which allows for accurate probing and testing of the die within the wafer. The XY stage is capable of moving die between test sites at speeds of up to 300mm/s with submicron run-out accuracy, ensuring that the measurements are consistent over a given test area. The unit is able to automatically recognize a range of die sizes and regions, allowing for the selection of individual dies within the wafer for testing. TENCOR 5107 features a range of high-resolution imaging systems, allowing for the identification and characterization of wafer defects. These include two independent line-scan cameras, which provide image resolutions up to 10.2um, as well as five area cameras for high-resolution imaging of die features. 5107 also includes advanced lighting systems, allowing for the highlighting of specific structures and structures on the backside of the die. For metrology applications, KLA / TENCOR 5107 is equipped with a range of 3D inspection systems which enable the measurement of surface height and roughness, thin-film and material thickness, gap measurement, and die-to-die registration. These measurements are all performed with high accuracy, ensuring that the microscopic structure of the die is accurately represented in the analysis and process development. KLA 5107 is also equipped with a range of analytical software tools, which enhance the machine's capabilities and enable the further analysis of inspection data. These tools also incorporate data-mining techniques, which can generate trending reports of process-development and yield analysis. Overall, TENCOR 5107 is a highly capable wafer testing and metrology tool for the semiconductor industry. It combines precision optics, imaging systems and analytical tools to enable the measurement and characterization of die down to the micro-scale, ensuring the accuracy of both test and metrology applications.
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