Used KLA / TENCOR 5107 #9117500 for sale

ID: 9117500
Inspection systems, parts systems.
KLA / TENCOR 5107 Wafer Testing and Metrology Equipment is a highly advanced, multi-channel system designed for precise wafer testing and metrology measurements. This benchtop unit offers a wide range of capabilities, including patterned wafer defect inspection, 3D metrology, line-width measurements, and critical dimension (CD) inspection. KLA 5107 utilizes a high-resolution imaging machine that achieves a contrast-to-noise ratio of greater than 1:200 for a variety of materials, as well as patterns both printed and etched. Features on the tool also include a digital servo module for motion control, a multi-channel integration platform for enhanced wafer handling, and an exceptionally fast data acquisition module for accurate results. Wafer processing is done automatically, eliminating the need for manual handling. TENCOR 5107 also features advanced algorithms for analysis and enable precise measurements. As a result, the asset can detect defects that are as small as 10nm with an accuracy of 0.2nm. Additionally, the model can measure pattern placement with an accuracy up to 20nm, as well as detail size-downsizing in line width technologies - a key factor in the world of semiconductor manufacturing. 5107 also includes advanced automation tools for processing that streamlines a number of steps associated with wafer testing and metrology. The automated equipment is able to detect, replicate, and analyze measurements in a single operation, eliminating the need for manual handling. This cuts down on the time and effort required for data analysis, making it one of the fastest test and measurement systems available. KLA / TENCOR 5107 offers advanced solutions for precision wafer testing and metrology needs. With its unique combination of automation, high-resolution imaging, and advanced analysis tools, this system provides users with highly accurate and efficient solutions. In addition, its multi-channel integration hub and exceptionally fast data acquisition modules make it ideal for any applications requiring precise wafer testing and metrology measurements.
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