Used KLA / TENCOR 5200 #293624519 for sale

ID: 293624519
Overlay measurement system.
KLA / TENCOR 5200 is an automated wafer testing and metrology equipment used for advanced process control and product development for the semiconductor industry. This state-of-the-art unit features integrated testing and analysis capabilities, enabling efficient wafer testing from the wafer start to the wafer finish. The system is equipped with a Wafer Matrix Test (WMT) station, a built-in scanning electron microscope, and advanced image analysis tools. The WMT unit provides high resolution images of up to seven different layers of a single wafer and enables fast decision-making. Through its combination of non-destructive testing and advanced image analysis, KLA 5200 can accurately determine defects in minutes. The scanning electron microscope provides a highly detailed three-dimensional picture of each layer to detect the presence of defects deeper than what can be effectively seen in the two-dimensional images produced by the WMT. By analyzing each layer in detail, the machine can accurately identify and distinguish structures at the nanometer level. The integrated CDS Image Analysis software provides a full suite of advanced measurement, analysis, and defect identification features. This enables operators to quickly and accurately identify and localize important features such as bridge defects, line defects, contact holes, and other features. TENCOR 5200 is designed to give operators full control over their wafer test processes. The tool is highly configurable, allowing operators to tailor the inspection criteria to their specific requirements. It also features adjustable sensitivity for more accurate and finer defect detection. Furthermore, the asset includes a comprehensive library of parameters and algorithms to streamline the entire process. 5200 is suitable for both R&D labs and production environments. Its automated operation ensures consistent, reliable results and efficient utilization of resources. With its combination of innovative hardware, advanced image processing, and streamlined user interface, KLA / TENCOR 5200 is a powerful wafer testing and metrology tool that enables faster, more effective decision-making.
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