Used KLA / TENCOR 5200 #293752141 for sale
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ID: 293752141
Wafer Size: 8"
Vintage: 2000
Overlay measurement system, 8"
(2) Open cassettes
Operating system: Windows NT
2000 vintage.
KLA / TENCOR 5200 is a state-of-the-art wafer testing and metrology system from KLA. KLA 5200 provides superior performance with fast throughput and high accuracy, perfect for manufacturers and process developers. It is the ideal platform for 2D and 3D global inspection or metrology. TENCOR 5200 leverages the most current technologies to quickly detect outliers and yield trends at a wafer or line level. Its full-slit sample-to-slit scan capability delivers fast data processing up to 150 wafers an hour, while its ultra-precise optical platform ensures accuracy and precision down to 10nm repeatability. 5200 has advanced software-based systems and capabilities for inspection, 3D characterization, and process control that are ideally suited for modern manufacturing. It incorporates automated procedures, extensive automation and process controls, and a feature-rich digital environment for wafer inspection and analysis. It offers support for digital image analysis for user definable defect detection, with process analytics and automated defect review to help identify elemental defects. KLA / TENCOR 5200 is equipped with an open architecture and third-party modularity, which enables tight integration into customers' existing infrastructure. It features an intuitive graphical user interface for ease of use, and its advanced automation capabilities eliminate tedious, manual operator steps. KLA 5200 is a comprehensive wafer testing and metrology system designed with industry standards in mind. Its superior performance and accuracy, along with its modular and easy-to-use design, make it the perfect system for 2D and 3D global inspection, characterization, and process control. With TENCOR 5200, manufacturers and process developers can ensure high yields, shorter development times, and maximum efficiency.
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