Used KLA / TENCOR 5200 #293771819 for sale

ID: 293771819
Overlay measurement system.
KLA / TENCOR 5200 is a high performance, multi-sensor metrology equipment dedicated to wafer testing and metrology. This system offers a unique combination of advanced wafer inspection and metrology capabilities. KLA 5200 supports a variety of sensor technologies and sub-systems, including contour scanning, 2D imaging, color profiling, film thickness measurements, wafer curvature measurements, and surface mapping. This powerful combination provides for a highly capable and accurate wafer inspection and metrology unit, capable of detecting sub-micron level defects and assessing defect types to determine their origin. The machine includes several software modules which allow the integration of automated test and metrology functions. This minimizes the risk of testing errors and enables efficient, high-throughput wafer inspection. Additionally, the software modules offer a variety of customizable options, allowing operators to adjust the parameters of an inspection to best suit their requirements. These features allow for a highly automated, reliable and accurate wafer testing and metrology tool. TENCOR 5200 asset also features high-precision scanning capabilities, enabling the measurement of small features such as memory "bitcells" and on-die test structures. The model is specifically designed for the inspection of semiconductor wafers including etched, thin-film, and thick-film layers. The equipment is made up of several subsystems, each designed to perform different tasks. These include a wafer robotic system, a wafer mapping unit, a wafer motion machine, a wafer surface acquisition tool and a wafer analysis asset. Additionally, the model can be integrated with KLA automated defect analysis equipment, ensuring an efficient and accurate analysis of defects in real-time. 5200 is a high performance wafer testing and metrology system, offering robust capabilities and a variety of advanced features. The unit is highly automated and reliable, enabling efficient, high-throughput testing and metrology. It is specifically designed for the detection of sub-micron level defects, providing manufacturers with the ability to accurately assess defect types and identify their origin. With its comprehensive set of features and capabilities, KLA / TENCOR 5200 is a leading solution for the testing and metrology of semiconductor wafers.
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