Used KLA / TENCOR 5200 #9299363 for sale

ID: 9299363
Overlay measurement system (2) VS46K-EA Digital VAX station 4000 60 CPU KA4A (2) FR-925WW-CD Digital venturis 5100 PC Included.
KLA / TENCOR 5200 is an advanced wafer testing and metrology equipment designed for high precision, exceptional performance and accuracy. Focusing on advanced dimensional, in-process and post-process wafer metrology, KLA 5200 features a superior wafer focus control providing superior measurement and repeatability. The system is designed to measure nanometer, sub-micron, and micron-level features on a variety of substrates, including silicon and gallium arsenide. It also offers a range of high-resolution, high-speed imaging and confocal microscopy capabilities. TENCOR 5200 is equipped with a choice of sensors and probe cards to measure, analyze and inspect a variety of test parameters, such as critical features, feature size, line width, flatness, etc. In addition, the unit is available with a variety of different scanning techniques, such as Photomask/Stencil Inspection, Sidewall Imaging, 3D Topography and Thin Film Analysis. With its wide range of configurable options, the machine can be customized to meet the specific needs of any customer. The tool offers a wide range of options for measurement, scanning, imaging and alignment, enabling it to measure even the most complex shapes and contours. 5200 is also equipped with a powerful toolset for analyzing, controlling and reporting on all types of wafer characteristics. This includes a visual reporting feature that allows engineers to quickly review and analyze test results in a user-friendly format. Additionally, the asset features an Automation Sampling Planner, which assists in defining and capturing the most representative batches of data. It also offers remote diagnostics, enabling users to troubleshoot, diagnose and control their model remotely. KLA / TENCOR 5200 provides the most advanced wafer testing and metrology capabilities in the industry. With its unsurpassed performance, accuracy and reliability, it is the perfect choice for any application requiring precision measurements and detailed analysis.
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