Used KLA / TENCOR 5200XP #9230350 for sale

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ID: 9230350
Wafer Size: 6"-8"
Overlay measurement system, 6"-8".
KLA / TENCOR 5200XP is an advanced wafer testing and metrology equipment designed to deliver the highest level of performance and accuracy in semiconductor device fabrication and inline process monitoring. With its advanced capabilities, KLA 5200XP provides an ideal platform for process and product characterization, yield improvement, and defect detection and correction. The system consists of a stage/prober module, a scan/inspect module, and an analyzer module. The stage/prober module provides a working surface for the wafer to be tested, as well as for a series of automated wafer handling components. The scan/inspect module utilizes a unique phased-array scanning head to accurately measure features on the top and bottom surfaces of the wafer. The analyzer module provides statistical and metrology data, as well as defect data analysis. The unit is capable of measuring features, thickness, defects, and topography on single and patterned device wafers. It utilizes a wide range of built-in sensors for a variety of metrology, such as optical reflectometry, capacitance, eddy current, laser interferometry, deflectometry, and reflectometry. TENCOR 5200 XP also comes with a wide range of special tools, such as infrared (IR) image analysis, advanced imaging and pattern recognition capabilities, advanced technologies for nano-scale line-width measurement, and special tools for 3D topography and line-width measurements. The machine is highly versatile and can be configured to suit specific application needs. It is designed with industry-standard interfaces and scale-ability, to easily connect with external instruments and software. It is also designed with a range of advanced reliability features, to ensure dependable and continuous operation. 5200 XP is ideal for product and process validation, plus production and yield improvement activities. It is backed by an experienced team of experts providing industry-leading customer support. With these features, KLA / TENCOR 5200 XP is the perfect solution for manufacturers looking to increase efficiency, improve yield, and lower cost of production.
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