Used KLA / TENCOR 5200XP #9241362 for sale
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ID: 9241362
Wafer Size: 8"
Overlay measurement system, 8", parts machine
Carcass with power supplies
Z-Stage
X / Y Stage without steppers
Encoder
Various other components
No auto-loader
No UI
Arc lamp housing
(3) Missing micrometers.
KLA / TENCOR 5200XP is an advanced wafer testing and metrology equipment designed to improve yield, reduce cost, and improve process control in semiconductor manufacturing. KLA 5200XP, combined with its software packages, provide a range of solutions for defect classification, wafer Mapping, and particle sizing. TENCOR 5200 XP is based on KLA Scanning Laser Imaging Microscope (SLIM) design. This system uses a Optical laser head to scan a sample, and a mechanical stage to move the sample. The SLIM consists of a line scan solution and a drop scan solution, which allows KLA 5200 XP to provide the best solution for both Focused Ion Beam (FIB) images and Optical images. A set of CCD cameras, image processors, and image receptors are all included in the unit, enabling accurate data acquisition and analysis. 5200XP also features several different imaging modes such as polarized light, transmitted light, fluorescent light, and inclined angle imaging. This helps users to gain a better understanding of defect classification, wafer mapping and particle sizing by providing different imaging solutions. TENCOR 5200XP can measure up to 8.5-inch wafers, allowing for reduction of cycle time. This machine also features a fast pattern recognition capability to detect variable defects on a wafer quickly and accurately. Further automated processes include defect classification using embedded algorithms and pattern recognition software. This KLA / TENCOR 5200 XP provides users with user-friendly software for data analysis. In addition, 5200 XP also supports various software packages such as wafer mapping and defect sorting. This gives users more control over defect classification, particle optimization, and yield. KLA / TENCOR 5200XP also provides an automated statistical analysis tool to help users improve processes, detect emerging problems, and identify possible solutions. Lastly, KLA 5200XP supports a traceability asset that enables users to monitor changes and the health of their process. This feature is particularly beneficial for improving process stability, yield and overall product quality. In conclusion, TENCOR 5200 XP is a comprehensive wafer testing and metrology model. It is designed to enable users to improve yield, reduce cost, and gain better process control in semiconductor manufacturing. The equipment also comes with a wide range of features that allow users to gain a better insight into defect classification, wafer mapping, and particle sizing.
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