Used KLA / TENCOR 5300 #120866 for sale
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ID: 120866
Wafer Size: 8"
Vintage: 2001
Overlay measurement system, 8"
Process: PEP
Control console:
Console PC
Monitor
Keyboard and trackball
Video printer
Sub storage device (CD/floppy/tape)
Power and signal cables
Handler:
Robot
Power and signal cables
Inspection station:
Main body stage
X-Y chuck stage
Optics
Power and signal cables
Includes:
Site preparation manual
Software version upgrade manual
Operation manual
Customer logbook
Backup floppies (1 set)
208 V, 1 phase, 50/60 Hz, 12.5 A
2001 vintage.
KLA / TENCOR 5300 is a state-of-the-art wafer testing and metrology equipment specifically designed for automated and accurate analysis of semiconductor devices. It offers a versatile and user-friendly platform for evaluation and characterization of wafers, dies and final components during production, as well as measurements and characterizations of various forms of packaging, including but not limited to chip-on-board (COB), ball grid array (BGA), and flip-chip designs. The system consists of a computer workstation, probe station, and an advanced CCD camera. The workstation is equipped with a touch-screen interface, integrated motion control and internal data acquisition, providing control and traceability of testing procedures and data collection. The Integrated Probe Station in KLA 5300 is a high-resolution, programmable probe head that easily moves and adjusts for different wafer sizes and probe shapes. It also offers highly accurate test measurements and data collection. In addition to its versatile probe station, the unit features advanced CCD camera technology for inspection, characterization, and defect detection. The automated imaging machine in TENCOR 5300 is capable of imaging at high resolutions, with 20µm spotting accuracy, and a reliable high-integrity image correction tool, providing high-fidelity images of each sample. Automatic and user-directed performance optimization techniques, including automated stitching and dynamic focus setting, enable quality metrology. 5300 also features a wide variety of applications and software options, allowing users to customize the asset to fit their specific needs. From basic process control to advanced IC testing, the model offers a variety of software packages and options, allowing users to tailor their equipment configuration to their specific requirements. In conclusion, KLA / TENCOR 5300 is a powerful wafer testing and metrology system, equipped with a versatile probe station and advanced CCD camera technology. With its user-friendly touch-screen interface, integrated motion control and data acquisition, and wide variety of software options, KLA 5300 is an ideal choice for quality testing and analysis of semiconductor devices and packaging.
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