Used KLA / TENCOR 5300 #9031694 for sale
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ID: 9031694
Overlay measurement system
Main body unit
Operation unit
Autoloader unit.
KLA / TENCOR 5300 is a highly advanced and automated wafer testing and metrology equipment designed for the growing semiconductor industry. The system provides superior capabilities for parametric yield measurement, rapid lot screening, wafer verification, and inspection work. Boasting exceptionally high productivity and accuracy, KLA 5300 is able to improve workflows and increase production yields within the production workflow. The unit is equipped with advanced optics and X-Y-Z scanning technologies, for rapid sample processing and fast test data acquisition. With its full computer-controlled operation, the machine optimizes ease of use and advanced performance with full automation. TENCOR 5300 offers 4-axis automatic wafer positioning, auto focus, and high-accuracy non-contact registration. Additionally, it comes equipped with a highly visible color LED display, which provides technicians a clear visualization of the systems operations. 5300 employs a variety of sophisticated algorithms to measure, test, and evaluate complex features. It provides line-by-line edge details, Integrated circuit turns, wafer constants, and other types of wafer requirements. Its enhanced parameter-based orientation tools allow for precise alignments over large areas, while its advanced error-detection algorithms help identify minute defects. The tool supports the most advanced test wafers, including custom-made, metal-oxide-semiconductor (MOS), copper, and low-k materials. It offers a wide range of applications, from multi-level resistivity, electrical parameters, and x-ray analysis, to shape registration and image stitching. With a completely configurable automation cell and an array of communication ports, KLA / TENCOR 5300 provides a fully integrated asset with comprehensive test capabilities. The model also supports sophisticated wafer productivity features, such as remote access, user-defined applications, and quick data analysis. Furthermore, it can be operated in a wide range of environmental conditions, allowing for monitoring and quality control of production sites worldwide. Utilizing advanced wafer testing and metrology technology, KLA 5300 provides superior capabilities that streamline operations, and increase production yields for any semiconductor-manufacturing environment.
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