Used KLA / TENCOR 5300 #9072400 for sale

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ID: 9072400
Overlay measurement system, 8" and 12" Open cassette.
KLA / TENCOR 5300 is an advanced wafer testing and metrology equipment designed for semiconductor and MEMS industries. It offers superior accuracy and data collection capabilities, enabling the detection and evaluation of defects and structures smaller than ever before. The system utilizes advanced technologies such as unified intelligence and a series of unique tools. These help identify both conventional and challenging defects, such as crossovers, disconnects, and spacings. This solution also provides image processing and analysis for challenging structures such as line edge roughness and diffraction gratings. KLA 5300's performance is enabled by its unique detectors, combiners, and scanheads. It takes advantage of proprietary optical configurations, advanced optics, and software controls. These technologies allow the unit to produce repeatable, reliable data with superior uniformity. It also offers an enhanced optical resolution of 20nm or better. The machine's auto-calibration and analysis functions help improve accuracy and reduce time. The wide-field inspection allows for faster detection of both subtle and larger defects. The tool's powerful data analysis algorithms enable automated measurements of line signatures and defect classifications. TENCOR 5300 also offers a variety of advanced metrology solutions. These include automated measurements for linearity, uniformity, and photoresist thickness. The asset's defect review also enables automated defect classifications for yield analysis, lithography failure analysis, and contaminant detection. The model's suite of metrology solutions make it ideal for monitor production quality. The equipment is designed to meet the requirements of the industry's highest standards. It is highly reliable and maintenance-free, and offers robust feature detection, extended dynamic range, and wide field of view. 5300 is a cost-effective, accurate solution for reliable wafer testing and metrology. It is suitable for a wide range of process control and advanced metrology applications.
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