Used KLA / TENCOR 5300 #9112501 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 9112501
Overlay measurement system.
KLA / TENCOR 5300 is a high performance wafer testing and metrology equipment that provides reliable, repeatable, and accurate measurement data for wafer production. The system is fully automated and built on a combination of linear and 2D image measurements and advanced algorithms, making it one of the most efficient solutions for wafer testing and metrology in the industry. KLA 5300 combines two complimentary technologies: optical wafer inspections and optical wafer metrology. The optical wafer inspection platform utilizes advanced optics and image processing algorithms to detect physical defects on wafer surfaces. The unit can detect a wide range of potential defects such as partials, scratches, and contaminants. This helps ensure process yield and results in a more reliable and robust product. The optical wafer metrology platform is designed to measure precise dimensional values from areas on a wafer, such as line widths, depths, patterns and critical dimensions (CDs). This is accomplished through an integrated, highly automated machine that includes advanced algorithms for fast and accurate measurements. The tool supports a range of wafers, from single crystal substrates to patterned wafers. A wide range of optical configurations is supported, including microscopes, telecentric and reverse-view systems, spectrophotometers, and laser interferometers. The asset also integrates the latest machine vision technologies such as laser beam positioning, simulated annealing, and auto-focus capabilities. The laser based systems enable high-speed scanning and faster overall process throughput, helping minimize model downtimes and improve production. In addition, the equipment is equipped with automated audit services, to ensure accuracy and reliability, even after long periods of operation. Overall, TENCOR 5300 is a robust wafer testing and metrology system designed to produce high quality and reliable process results. Its combination of advanced optical measurement technologies and powerful metrology algorithms helps streamline the production process and ensures reliable and accurate data for a wide range of wafer production applications.
There are no reviews yet