Used KLA / TENCOR 5300 #9161978 for sale
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ID: 9161978
Vintage: 2001
Overlay measurement system
Hardware configuration:
Chuck: 8"
Handler: Open cassette with PRI dual end-effector robot
Cassette type: Dual open cassette
Line conditioner: Yes
Network: Yes
Signal tower: No
UPS: Smart-UPS 500
Main console: Yes
Load port: 8"
(2) Open cassette stations
VME:
CPU Board: Yes
Memory board: Yes
Video (Matrox) board: Yes
I/O Board: Yes
PZT Controller board: Yes
I/O Adapter board: Yes
Motion and controller:
Power supply: Yes
X Driver board: Yes
V Driver board: Yes
Z Driver board: Yes
T Driver board: Yes
L Driver board: Yes
XYT Stage: Yes
PM Target: Yes
Z Motor: Yes
Host chuck: 8"
Z PZT: Yes
PCB and pneumatics panel:
I/O Interface board
PZT Driver board
Interlock board
Pressure panel
Vacuum panel
Flotation module:
IDE Controller
(8) Motors
(3) Proximity sensors
(3) Hard stop
LINNIK and AMS:
HLS Lamp housing: Yes
Dual aperture: Yes
LLG: Yes
LlNNIK Camera: Yes
PIN Diode array: Yes
P PZT: Yes
Shutter: Yes
AMS Camera: Yes
Power module:
P Power transformer (Line conditioner): Yes
AC Compartment: Yes
Main DC power supply: Yes
HLS Power supply: Yes
Software configuration:
Operation system: Windows NT 4.0
Computer configuration:
CPU: Pentium II 400 MHz
RAM: 256M
(2) Hard drive disks: 9G
Floppy drive: Yes
CD ROM: Yes
Tape driver: Yes
Monitor: Yes
Thermal printer: Yes
Keyboard / Tracking ball: Yes
Facilities:
Input power: 225VAC, 50/60 Hz
Computer input power: 110 VAC
Input vacuum: 25 Inches Hg
Input CDA: 97 - 110 PSI
Handler check:
Robot: Yes
End effector: Yes
Pre aligner: Yes
L Cassette: Yes
R Cassette: Yes
Currently crated
2001 vintage.
KLA / TENCOR 5300 Wafer Testing and Metrology Equipment is a highly accurate and precise system for analyzing and determining the quality of a semiconductor wafer. It is powered by an ultra-fast laser scanner which can measure wafer dimensions, flatness, and thickness with incredible accuracy in a short amount of time. The unit's main features include the high-speed laser scanner, image analysis software, and integrated software and hardware packages. The laser optics is capable of scanning the entire wafer quickly and efficiently, extracting all necessary data such as edges, line lengths, line widths, and other surface characteristics. The image analysis software then takes readings from the laser machine and generates a digital map of the wafer surface that is used to generate reports, drawings, and other data outputs. All the data collected is stored in a large database to be accessed at any time. The integrated software and hardware packages give users powerful tools to quickly and accurately measure complex surface shapes and determine any anomalies or defects in the wafer. The necessary correction parameters to be applied to each wafer are calculated automatically by the tool based on the collected data. KLA 5300 Wafer Testing and Metrology Asset provides detailed reports that are used for quality control and product development, as well as for evaluating the impacts of process variations on the wafer quality. It is a highly efficient and reliable model, with a user-friendly interface that allows users to perform both regular and specific inspection and analysis operations quickly and efficiently. Its accuracy and range of capabilities make it an invaluable tool for any semiconductor manufacturer or laboratory.
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