Used KLA / TENCOR 5300 #9190561 for sale

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ID: 9190561
Overlay measurement system.
KLA / TENCOR 5300 Wafer Testing and Metrology Equipment is an advanced semiconductor integrated circuit examination tool that provides accurate measurements and analyses of thickness, defects, and electrical characteristics of thin wafer layers. This comprehensive system features advanced optical imaging for high-resolution inspection and mapping of wafer surfaces, as well as automated image stitching for seamless examination of complete wafer surfaces. KLA 5300 utilizes defect-sensing and fine-tunable focus technology to rapidly inspect and characterize microscopic defects using real-time three-dimensional imaging. It assembles rich and detailed data on surface roughness, surface defects, pattern-dependent height information, and cross-sectional anomalies. As part of its capability to measure surface topography, the unit captures data at a rate of up to 320 points per second, for rapid measurement of successive points without interruption. Moreover, TENCOR 5300 incorporates metrology features that provide precise and repeatable electrical measurements, including sheet resistivity, sheet resistance, and sheet capacitance measurements. Moreover, the machine offers unique voltage contrast features, as well as two-terminal Kelvin contact techniques for contact resistance inspections. The tool is controlled through a uniquely intuitive and user-friendly graphical user-interface, which provides operators easy access to program memory, parameters, and measurement tools. In addition, the user interface is configurable for use with sophisticated statistical process control software applications. 5300 asset provides a user-friendly environment for rapid data-collection through its embedded sensor systems which provide real-time viewing of critical electrical parameters and the capture of electrical data. It performs these inspections accurately while preventing operator fatigue due to ergonomically advanced design standards. KLA / TENCOR 5300 is the ultimate solution for semiconductor wafer insight and analysis. Its integration of optical and electrical precision is unmatched by any other wafer testing model. Ultimately, the equipment is designed to deliver maximum yield and reliability for any integrated circuit wafer development, testing and production environment.
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