Used KLA / TENCOR 5300 #9197519 for sale
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ID: 9197519
Wafer Size: 8"
Vintage: 2001
Overlay measurement system, 8"
Process: PEP
Control console:
Console PC
Monitor
Keyboard and mouse(Track ball)
Video printer
Sub storage device (CD / Floppy / Tape)
Power & signal cables
Handler:
Robot
Power & signal cables
Inspection station:
Mainbody stage
Chuck stage: X, Y
Optic
Power & signal cables
Includes:
LEXMARK Printer
Backup floppy
Spanner
2001 vintage.
KLA / TENCOR 5300 is a powerful wafer testing and metrology equipment designed for the accurate measurement of wafer and device parameters. This state-of-the-art system helps to identify defects in both film and structures on wafers, as well as determine die-to-die variations in parameters such as composition, film thickness, critical dimension, and absorption rate. The unit operates with unparalleled speed and accuracy, providing maximum throughput with minimal operator intervention. It utilizes state-of-the-art hardware such as a Programmable Logic Controller (PLC) to provide deterministic control of probe loading, and feature recognition reports and a multi-tasking environment to maximize efficiency. A unique digital CCD imaging technology is used to accurately capture and store images, while a powerful digital signal processor enhances image contrast and allows for quick and accurate measurements. KLA 5300 is a user-friendly machine that can be quickly and easily integrated into any existing equipment. Modular software allows the user to access a variety of features to aid in setting up and running tests quickly and easily. The tool also features abundant onboard memory that allows for the storage of test data and detailed analysis. The asset's hardware and software are designed to ensure high performance and precision. SmartSensors® technologies are used to accurately and precisely detect surface variations in die-to-die orders. The model can accommodate a variety of wafer sizes, including sizes up to 200 mm. The use of touch sensitive controls ensures ease of operation. With each test, the equipment also provides real time output and can be customized to perform specific tests with specific desired outcome. TENCOR 5300 wafer testing and metrology system is a powerful, yet easy to use piece of equipment that provides accurate and reliable results in almost any test environment. With its high accuracy performance, low cost of ownership, and easy-to-use control interface, 5300 is an ideal choice for industrial wafer testing.
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