Used KLA / TENCOR 5300 #9205445 for sale
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ID: 9205445
Wafer Size: 8"
Vintage: 2001
Overlay measurement system, 8"
Control console:
Console PC
Monitor
keyboard and mouse (Track ball)
Video printer
Sub storage device (CD / Floppy / Tape)
Power & signal cables
Handler:
Robot
Power & signal cables
Inspection staion:
Mainbody stage
X&Y chuck stage
Optic
Power & signal cables
Components name:
Line conditioner
Handler
Console PC
DSW
Power supply: 208V, 50/60 Hz, 12.5A, 1P
Manuals included
2001 vintage.
KLA / TENCOR 5300 is a revolutionary wafer testing and metrology equipment designed to give users the ability to quickly and accurately analyze integrated circuits, MEMs, photovoltaics, and other wafer-level components. This state-of-the art system is the ideal tool for development and troubleshooting needs. KLA 5300 provides precise measurements of electrical, physical, and chemical layers of wafers. It performs electrical tests, inspects microscopic images, and performs optical measurements. The unit is sensitive enough to detect features as small as 0.2 μm. TENCOR 5300 includes several cutting-edge tools, including specialized motors, cameras, illumination systems, and many others. The motor, for instance, controls the stage which the wafer rests on. It can move the stage across the machine so that different sections of the wafer can be examined. The camera takes images of the wafer so that various features can be studied under a variety of magnifications. Additionally, the illumination tool allows users to observe the sample wafer during the testing process. 5300 also includes a number of probes to measure electrical properties of the wafer. These probes can measure currents, voltages, capacitance, and leakage. The probes are tipped with various combinations of capacitance, resistivity, and voltage clamp functions which allow them to accurately measure different electrical properties. Furthermore, the asset is equipped with software to help generate the raw data needed by the proprietary module. This module uses proprietary algorithms to interpret the collected data and produce a report. The report will contain valuable information about the wafer's characteristics, making it easier for users to troubleshoot and design better components. KLA / TENCOR 5300 is an impressive wafer testing and metrology model that offers the latest in high-precision measurements and analysis. This equipment is an invaluable tool for those looking to analyze and develop integrated circuits, MEMs, and other wafer-level components.
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