Used KLA / TENCOR 5300 #9205449 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9205449
Wafer Size: 8"
Vintage: 2001
Overlay measurement system, 8"
Control console:
Console PC
Monitor
keyboard and mouse(Track ball)
Video printer
Sub storage device(CD / Floppy / Tape)
Power & signal cables
Handler:
Robot
Power & signal cables
Inspection staion:
Mainbody stage
X&Y chuck stage
Optic
Power & signal cables
Components name:
Line conditioner
Handler
Console PC
DSW
Included:
Site preparation manual
Operation manual
Customer logbook
Backup floppy
Power supply: 208V, 50/60 Hz, 12.5A, 1P
Manual included
2001 vintage.
KLA / TENCOR 5300 is an automated wafer testing and metrology equipment for advanced semiconductor device development, manufacturing, and repair. The system features an automated dual-sided, dual-lateral, vertical motion wafer handler to secure up to 150mm (6") wafers. The uniquely designed accelerator rails speed up and slow down the wafer handler for rapid alignment and precise metrology measurements and imaging. KLA 5300's GigaView9 detector deploys three high-intensity lasers that are precisely incident on each die location to perform advanced surface analysis. This allows for real-time scanning with non-destructive imaging and darkfield imaging, facilitated by a ProAutofinder to automatically detect dies, target locations, and trace paths to be imaged. In addition, the unit's Pulse Pattern Generator (PPG) enables tailored TFT solutions, from small to large die sizes, on a wide range of measuring parameters. A user-friendly software environment featuring Data expert Interval Explorer (DEXIE) simplifies operation and provides statistical analysis capabilities such as capability limits and histograms. In addition, the machine also supports multiple selection tools for wafer map analysis to ensure quality control. With its robust wafer measurement and metrology performance, TENCOR 5300 is a high-speed, cost-effective solution for advanced wafer fabrication and device development. By combining industry-leading measurement performance with intuitive user-friendly software, the tool enables fast and reliable process control. With the asset's wide range of features and capabilities, quality control teams can be assured of precise and repeatable measurements in the production and repair of wafers.
There are no reviews yet