Used KLA / TENCOR 5300 #9205449 for sale

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ID: 9205449
Wafer Size: 8"
Vintage: 2001
Overlay measurement system, 8" Control console: Console PC Monitor keyboard and mouse(Track ball) Video printer Sub storage device(CD / Floppy / Tape) Power & signal cables Handler: Robot Power & signal cables Inspection staion: Mainbody stage X&Y chuck stage Optic Power & signal cables Components name: Line conditioner Handler Console PC DSW Included: Site preparation manual Operation manual Customer logbook Backup floppy Power supply: 208V, 50/60 Hz, 12.5A, 1P Manual included 2001 vintage.
KLA / TENCOR 5300 is an automated wafer testing and metrology equipment for advanced semiconductor device development, manufacturing, and repair. The system features an automated dual-sided, dual-lateral, vertical motion wafer handler to secure up to 150mm (6") wafers. The uniquely designed accelerator rails speed up and slow down the wafer handler for rapid alignment and precise metrology measurements and imaging. KLA 5300's GigaView9 detector deploys three high-intensity lasers that are precisely incident on each die location to perform advanced surface analysis. This allows for real-time scanning with non-destructive imaging and darkfield imaging, facilitated by a ProAutofinder to automatically detect dies, target locations, and trace paths to be imaged. In addition, the unit's Pulse Pattern Generator (PPG) enables tailored TFT solutions, from small to large die sizes, on a wide range of measuring parameters. A user-friendly software environment featuring Data expert Interval Explorer (DEXIE) simplifies operation and provides statistical analysis capabilities such as capability limits and histograms. In addition, the machine also supports multiple selection tools for wafer map analysis to ensure quality control. With its robust wafer measurement and metrology performance, TENCOR 5300 is a high-speed, cost-effective solution for advanced wafer fabrication and device development. By combining industry-leading measurement performance with intuitive user-friendly software, the tool enables fast and reliable process control. With the asset's wide range of features and capabilities, quality control teams can be assured of precise and repeatable measurements in the production and repair of wafers.
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