Used KLA / TENCOR 5500 Surfscan #293587041 for sale
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ID: 293587041
Wafer Size: 4"-6"
Inspection system, 4"-6"
Process: Cassette to cassette
High throughput
High resolution.
KLA / TENCOR 5500 Surfscan is a wafer testing and metrology equipment used in the semiconductor industry for precise wafer measurements. This system is a highly accurate, non-contact unit that is used in measuring the form and profile of patterned and unpatterned wafers. Using an automated optical profiler, the machine is capable of ultra-low noise, fast and precise scanning across a broad range of materials. KLA 5500 Surfscan uses a non-contact optical microscope and a proprietary laser scanning interferometry (LSI) tool to measure across a range of wafer materials. The LSI asset creates a three-dimensional map of a wafer's topography, allowing users to inspect, analyze, and report on the surface features of even the smallest features. The model is capable of detecting surface feature shapes and heights down to 10 nanometers. In addition to measuring surface feature shapes and heights, TENCOR 5500 Surfscan measures the resistivity of a wafer. This measurement is used to characterize the wafer's electrical resistance, which is important to the functioning and failure of an electronic device. 5500 Surfscan is capable of measuring resistivity with a high degree of accuracy, allowing users to detect and monitor voltage changes, particularly in ICs, transistors, and other traceable components. KLA / TENCOR 5500 Surfscan is also equipped with a software application that enables visual interpretation and analysis of wafer data. By plotting and interpreting data quickly and accurately, users can gain a better understanding of their wafer patterns for further study and experimentation. This equipment is user-friendly, and enables automated operations for even more precise results. Overall, KLA 5500 Surfscan is a reliable and powerful wafer testing and metrology system. Its ability to measure form and profile at a high resolution, along with the detection of surface feature shapes and resistivity, provides users with reliable data that can be used in designing and manufacturing semiconductors. In addition, the software application offers helpful visual analysis tools, enabling users to quickly and easily interpret, analyze, and report on wafer data. As such, TENCOR 5500 Surfscan is an indispensable tool in the semiconductor industry.
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