Used KLA / TENCOR 5500 Surfscan #293594917 for sale

KLA / TENCOR 5500 Surfscan is a state-of-the-art wafer testing and metrology equipment designed to detect and evaluate critical defects in the fabrication of semiconductor wafers. The system is capable of detecting and measuring a wide range of defects including pits, cracks, grain boundaries, thin films and residues, wafer thickness non-uniformity, warp or bow, particle contamination, and resistivity non-uniformity. In addition, KLA 5500 Surfscan's advanced technology supports both electrical testing and artwork inspection for faster and more accurate defect detection. TENCOR 5500 Surfscan is designed for productivity, built with a fast and intuitive automated measurement process that enables repeatable accuracy and precise control. The unit is equipped with hundreds of sensors and scanning stages to accurately measure dimensions, as well as high-resolution imaging and data analysis algorithms that identify and categorize defects. The built-in software automatically aligns wafers and measures defect locations, enabling rapid screenings of up to 160 wafers per hour. The machine also features an optional advanced contour profile measurement systems that enhances its defect detection capabilities, allowing for the efficient and precise measurement of surface profile roughness and other physical features, including profile geometry, step heights, and over- and undershoot angles. 5500 Surfscan offers multiple imaging modes, including brightfield, darkfield, and differential imaging, to aid in the determination of defect size, density, and orientation. The hardware of KLA / TENCOR 5500 Surfscan is highly configurable, with multiple cameras and lenses, which can be configured to capture images from different angles. The tool is equipped with a variety of illuminating sources, including LED and mercury arc lamps, and comes with a wide range of accessories such as external filter cubes and spectrometers, mini-spec systems, and digitizing modules. A heated stage enables users to analyze a sample while it is in a high-temperature environment. In addition, KLA 5500 Surfscan is compatible with a suite of advanced software programs to maximize its accuracy and efficiency. These include Dynamic Analysis Software, Flowvision software, and Curv-x software, enabling comprehensive analysis and reporting of surface features, profile analysis, and sizing of the defects. This allows for timely feedback for process control and monitoring, helping to ensure defect-free production with reduced turnaround time.