Used KLA / TENCOR 5500 Surfscan #293616224 for sale

ID: 293616224
Inspection system.
KLA / TENCOR 5500 Surfscan is a state-of-the-art wafer testing and metrology equipment. It is designed to support the defect review, defect detection and inspection needs of the semiconductor industry. This system provides comprehensive and reliable results for particle inspection, surface imaging and topography, as well as inter-die and inter-layer defect studies, allowing for thorough analysis at the wafer level. KLA 5500 Surfscan has a 1.4 Gigapixels, 1.3 Megapixel CMOS imaging detector, with a resolution of 12 μm. This enables precise imaging of all the particles, defects and other features on the surface of the wafer. The imaging unit is housed inside the integrated Motorized Wafer Stage, which enables superior positional accuracy to map particles and defects precisely, as well as controlled scanning/imaging/measurement of defect locations. Additionally, the machine also features a built-in laser interferometer which ensures precise probing and scanning of wafers, and precise matrix representation of the defect locations. The Surfscan 5500 is capable of both 2D and 3D imaging, allowing for precise characterization of surface topography. This is done using the tool's advanced algorithms which provide high resolution results and precise measurements. The software also includes automated statistical analysis and graphing tools to enable easy comparison of results from different locations, as well as from different sites or manufacturers. This software also enables easy data storage and visual quality review of wafers. Overall, TENCOR 5500 Surfscan asset is an indispensable tool for semiconductor manufacturers, providing precise and reliable results for particle inspection, surface imaging and topography, as well as inter-die and inter-layer defect studies. With its high resolution imaging and automated analysis tools, this model is able to facilitate fast and accurate quality reviews, and is an excellent addition to any wafer fabrication facility.
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