Used KLA / TENCOR 5500 Surfscan #55391 for sale

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ID: 55391
Vintage: 1989
Inspection system Power: 110 VAC - 160 VAC 1989 vintage.
KLA / TENCOR 5500 Surfscan is an advanced wafer testing and metrology equipment that enables high throughput testing and analysis of various types of semiconductor devices. This system is integrated with an advanced optical scatterometry unit that enables improved characterization of structures and electrical parameters on a semiconductor device. This machine also comes with robust autofocus functionality that optimizes the imaging for uniformity and critical metrology results. In addition, KLA 5500 Surfscan is capable of providing low distortion testing, making it suitable for evaluating devices with high aspect ratios and curved surfaces. TENCOR 5500 Surfscan comes with the Scan Generator software, which facilitates wafer tracking and global alignment measurement. This software supports multiple feature configuration and evaluation, including global alignment measurements, optical scatterometry, radius of curvature, tilt, best focus points, etc. Additionally, its multi-dimensional transform analysis allows accurate comparison between the actual feature shape and the target device. The tool typically uses an air bearing scanner for scanning 500-mm wafers with both 4-inch and 6-inch measuring fields. This asset is able to measure low pattern densities due to its low resolution levels and high speed scan rates. It also offers three different scan options, including high-resolution, medium resolution, and fast scan. In addition to scanning wafers, the model also offers a 3-D rotation stage to measure discrete components or devices. 5500 Surfscan comes with user-friendly inspection software, enabling easy implementation and operation of the equipment. This intuitive software has a graphical user interface that facilitates quick setup and analysis of results. The software also provides powerful data analysis options, including curve fitting and parameter extraction, to enable efficient data analysis. The system is used in a wide range of wafer metrology applications, including critical geometry assessment, pattern topology measurements, defect detection and analysis, and other inspection applications. It also facilitates characterization studies, yield enhancement, process qualification, and other applications related to reliability and process development. The real-time monitoring capabilities of KLA / TENCOR 5500 Surfscan make it suitable for inline process control and advanced process improvement.
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