Used KLA / TENCOR 5500 Surfscan #9003849 for sale

KLA / TENCOR 5500 Surfscan is an automated wafer testing and metrology equipment used by industries to measure the physical integrity of wafer substrates. This system acquires micron-scale critical dimensions using advanced optical sensing technology across the surface of the device. KLA 5500 Surfscan delivers sub-micron measurements in a non-contact and non-invasive method, creating a virtual image of the wafer's surface that can be used to assess the uniformity of the wafer's surface topography. TENCOR 5500 Surfscan is exceptionally precise, offering less than 5 nanometer (nm) linearity accuracy and 1 nm vertical accuracy, while providing valid measurements at 4.5 mm minimum feature size. 5500 Surfscan captures 3D topography information by scanning a 3.5-inch nominal full-sized wafer into digital form. It does this using a 5500 linear imaging unit (LIS) comprised of a dual lens optical sensing head and CCD linear camera. As the LIS acquires data, the two-dimensional image is converted into three dimensions. The data is then processed, archived and inspected using either KLA / TENCOR 5500 Surfscan's On-Track Programmer (OTP) or Automatic Defect Review Machine (ADRS). The On-Track Programmer (OTP) is a stand-alone graphical user interface (GUI) that automates the wafer-measurement process. Data entered into the OTP include wafer size, part number, number of shot size images, scan range, line speed and feature size. From this, the OTP creates a data acquisition plan, a series of data scans that can perfectly cover the surface of the wafer. It also creates a map of the defects on the wafer for further analysis. The data collected is then compiled and stored in the OTP's database for both continuous monitoring and post-measurement analysis. The Automatic Defect Review Tool (ADRS) is a software package that allows operators to review the data collected by the On-Track Programmer. It utilizes a combination of advanced algorithms and software tools to compare the before and after images of a wafer. If any differences between the two images are detected, the ADRS will automatically flag areas for manual inspection. KLA 5500 Surfscan is a powerful tool for ensuring the quality of wafer substrates. It offers a non-contact, non-invasive method of quickly and accurately measuring critical wafer dimensions up to 1 nm in vertical accuracy. The On-Track Programmer creates a data acquisition plan and stores the data for further analysis, while the Automatic Defect Review Asset provides an easy-to-use interface for defect inspection. Overall, TENCOR 5500 Surfscan is a highly reliable wafer testing and metrology model that delivers excellent results.