Used KLA / TENCOR 5500 Surfscan #9312779 for sale
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ID: 9312779
Inspection system
Cassette locator block set, 4"-6"
Locator block set, 8".
KLA / TENCOR 5500 Surfscan is a high-precision wafer testing and metrology equipment that provides precise measurements for semiconductor chip manufacturers. This system is capable of measuring a wide range of electrical, optical, topographic, and chemical properties on a variety of wafers and other samples up to 200mm in diameter. KLA 5500 Surfscan uses an advanced multi-wavelength interferometric platform with a digital objective lens unit to accurately image defects and metrology information on the surface of wafers. This machine is capable of detecting sub-micron features, and allows defect classifications with an accuracy of 0.1μm. TENCOR 5500 Surfscan also features a programmable sample stage which provides the flexibility to measure multiple sample and wafer types. The tool includes a powerful image acquisition suite that can collect images of samples with high granularity, allowing accurate measurements of physical, electrical, optical, topographical, and chemical properties. Additionally, 5500 Surfscan's integrated multi-task processor allows for sub-second analysis of data, allowing for rapid assessment of critical metrology values. The asset is configured with an industry-standard database as the data archiving model. This provides a secure storage facility for collected data in addition to advanced animation and report generation capabilities. Further, the data archiving equipment allows the user to quickly recall and view pertinent test data and analysis. KLA / TENCOR 5500 Surfscan utilizes KLA industry-leading controller software for sophisticated system integration and control. The software includes a library of powerful analysis tools that allow the user to quickly identify trends in wafer test data and analyze defect parameters. Additionally, controller software supports multiple languages for ease of integration into any existing manufacturing process. In addition to providing an integrated hardware and software solution, KLA 5500 Surfscan offers the flexibility to integrate additional peripherals from third-party vendors. This allows the user to tailor the unit to their specific needs and expand the capabilities of the machine as new technologies are developed. In conclusion, TENCOR 5500 Surfscan is a highly versatile wafer testing and metrology tool that provides accurate measurement of multiple properties on a variety of wafer and sample sizes. With advanced imaging capabilities, powerful data analysis software, secure archiving, and the added flexibility of integration with third-party peripherals, 5500 Surfscan is a reliable solution for all of your wafer testing and metrology needs.
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