Used KLA / TENCOR 587 #9399578 for sale

KLA / TENCOR 587 is a wafer testing and metrology equipment designed for semiconductor device testing and failure diagnostics. It utilizes image acquisition and image analysis technology to measure a variety of device parameters such as linewidths, overall surface characteristics, defect location and size, and electrical parameters. KLA 587 is ideally suited for applications such as wafer binning, process control, and yield improvement. The system provides a variety of image analysis capabilities that include particle measurement, critical dimensioning (CD), overlay alignment, and line node and via measurements. TENCOR 587 combines advanced image acquisition and analysis technology with robust data management and reporting features to deliver reliable and accurate results. The unit can measure a wide variety of features including minimum linewidths, line nodes, vias, anomalies, patterns, defects, photo-resist anomalies, and device parameters. The machine can also handle a variety of wafer substrates, support most industry-standard fab processes, and provide a wide range of analysis and reporting capabilities. Notable features include a large, high-resolution multi-level CCD imaging tool, a large field-of-view for wide-area analysis, and a high-speed dual-channel image acquisition asset. 587 also offers an advanced defect classification and sorting feature which allows it to detect and capture multiple specks, pits, scratches, and other defects in a single image. The model's robust data collection and management equipment allows it to store and process large amounts of data quickly and efficiently. KLA / TENCOR 587 is a versatile and powerful system designed to meet the needs of today's most advanced semiconductor fabs. With its robust image acquisition and analysis capabilities, extensive data processing and storage capacity, and comprehensive reporting features, KLA 587 is an ideal solution for wafer bins and process control needs.