Used KLA / TENCOR 6100 #9226702 for sale
Wafer Size: 6"
Particle inspection system, 6" 1996 vintage.
KLA / TENCOR 6100 is a wafer testing and metrology equipment that provides model-based metrology services for semiconductor fabrication. This system enables customers to accurately assess the properties of integrated circuits (ICs) and other devices, allowing manufacturers to measure individual features as small as a few nanometers. KLA 6100 model is equipped with a Contour-MPXTM overlay module which provides high-precision alignment performance of up to 3nm repeatability for cross wafer overlay. The unit also includes a Die-AlignerTM scanning machine for accurate wafer measurement, design, and alignment. TENCOR 6100 also boasts a high-resolution tolerance measurement package that can detect and measure very small defects in your device or across the wafer. 6100 can be used to analyze features for transistor and wafer characterization with high precision, with its 100nm resolution in both plane scans. Its combination of automation and model-based metrology helps you achieve repeatable and reliable processes. Moreover, KLA / TENCOR 6100 is also equipped with an Advanced Particle Analysis™ package which lets you identify and measure particles, contaminants, and defects in a wide variety of materials. This tool is also capable of analyzing wafer shape or topography, providing measurements for surface flatness, profile roughness, and uniformity. KLA 6100 model also boasts the Advanced Optical Overlay package, which allows you to get better control and accuracy for wafer die placement as well as advanced optical overlay metrology. The asset also is well suited for semiconductor fabrication processes, with its ability to detect defects in the manufacturing process that are not visible to the naked eye. Overall, TENCOR 6100 model is an excellent choice for manufacturers looking for a reliable and precise metrology equipment. With its durable hardware and advanced features, it provides customers with an effective solution for their wafer testing and metrology needs.
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