Used KLA / TENCOR 6100 #9250107 for sale

KLA / TENCOR 6100 Wafer Testing and Metrology Equipment is a fully automated wafer inspection tool designed to streamline wafer manufacturing processes and maximize yield. It is composed of several components, including an automated wafer housing station, a stage scanner system, and a number of automated metrology modules. The automated wafer housing station includes a batch loading carousel that can hold up to 66 8-inch wafers. This ensures that the unit can work smoothly and efficiently without the constant manual attendance of a technician. The stage scanner machine is the motorized platform designed to move wafers around and deliver them to the right metrology module. It consists of precision dovetail guides for smooth motion with two rotary encoders for speedy travel to the defined positions. It also can detect height difference of up to 10 microns, allowing for precise measurement. The metrology module allows for quick and accurate measurement of a wafer's critical parameters, such as thickness. The tool uses an interferometer to measure the thickness in single or multi-wavelength modes. It also uses spectroscopic ellipsometry to measure film thickness, surface roughness, and optical constants. Other included features are stage calibration and vision support with a digital camera. KLA 6100 is an essential tool for device manufacturers seeking to improve their wafer yield and maximize their output. It is a fast, reliable, and accurate asset that ensures a high level of quality and precision with minimal time and effort. With its precise metrology capabilities and automated wafer handling, TENCOR 6100 is ideal for a wide range of wafer processing applications.