Used KLA / TENCOR 6200 Surfscan #293739429 for sale
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ID: 293739429
Wafer Size: 8"
Particle inspection system, 8"
Maximum wafer capable, 8"
Pentium PC
Sensitivity:
Defect: 0.12µm
Defect map and Histogram
Haze map and Histogram
Argon Ion Laser
2D Signal integration
Parallel printer port
Blower box
SECS II Communication port
Windows OS
Operations manual and documentation.
KLA / TENCOR SFS 6200 is a high-performance wafer testing and metrology (measurement) equipment designed to provide accurate and reliable measurements of the characteristics of semiconductor dies and wafers. It leverages advanced imaging techniques and extremely precise force-plate technology to measure wafer-level and device-level features accurately. The system is capable of measuring a wide range of essential characteristics, including die size and shape, uniformity and positional accuracy, device critical dimensions, kerf depth, as well as electrical properties such as leakage current and resistance. The unit's cutting-edge imaging technology is powered by advanced, proprietary algorithms and sensors, which ensure extremely accurate and reliable results. The machine's imaging capabilities provide full metrology coverage of wafers, enabling customers to gain detailed insight into wafer-level characteristics such as bonding and stitching, micro-contamination and die-to-die nonuniformities. In addition, the tool's imaging asset enables process optimization with the use of quick and easy autofocus and autoshutter features. The model also features a reliable and robust force-plate technology that can accurately measure device-level characteristics such as device critical dimension (CD), edge smoothness and kerf depth with three high-speed force sensors. This allows customers to quickly identify problem areas in the wafer and take immediate corrective measures. The equipment also offers fast set-up and changeover capabilities, allowing customers to perform testing quickly and efficiently. Furthermore, the system's onboard computer provides comprehensive control of all steps of the measurement process, including automated operation. In addition, KLA SFS 6200 unit ensures a high level of quality assurance through its easy integration with KLA Eagle Quality Management Software. This software provides customers with real-time data analysis and simple process control for complete lot-level control. All in all, TENCOR SFS6200 machine provides unparalleled accuracy and reliability in testing and metrology of semiconductor dies and wafers. Thanks to its advanced imaging and force-plate technologies, customers can quickly and easily measure essential characteristics of their wafers and devices for improved performance, efficiency, and quality assurance.
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