Used KLA / TENCOR 6200 Surfscan #293831075 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment that enables advanced metrology and defect review with unrivaled accuracy, speed, and performance. It is the industry's most precise and accurate system. KLA 6200 Surfscan utilizes an ultra high-resolution charged coupled device camera and a dedicated, custom designed beam column optics module to achieve unprecedented wafer inspection, defect detection and characterization, and measurement accuracy and consistency. The unit also features an extremely fast scanner, with speeds up to 10 µm/s or greater. It can also accommodate wafers with diameters up to 12 inches. TENCOR 6200 Surfscan uniquely combines optical metrology, defect review, and metrology stability analysis with unprecedented accuracy, accuracy stability, and repeatability. This highly advanced machine is capable of measuring various feature critical dimensions on both flat and patterned surfaces, including line widths, space widths, pad and via diameters, and line edge roughness. It also has powerful imaging capabilities for defect and particle analysis, and advanced software for defect characterization and classification. PROMETRIX 6200 Surfscan's advanced algorithms enable several key capabilities, including 3D optical roughness measurements, particle analysis (surface contaminants), and stringent in-line inspection requirements. The tool also provides a wide range of test measurements, such as strip and grating measurements, 3D line profile measurements, and patterned wafer analysis, as well as basic and advanced defect review. Overall, 6200 Surfscan is an excellent choice for manufacturers in need of precise and accurate wafer testing and metrology. Its powerful scanning capabilities, imaging capabilities, and advanced algorithms empower a variety of measurements and defect review, making it an ideal asset for a wide range of applications.