Used KLA / TENCOR 6200 Surfscan #9303158 for sale
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ID: 9303158
Wafer Size: 4"-8"
Vintage: 1995
Non-pattern surface inspection system, 4"-8"
PSL Calibration
Defect sensitivity: 0.1 Micron (PSL STD)
Haze sensitivity: 0.02 PPM
Haze resolution: 0.002 PPM
Accuracy within 1%
XY Coordinates
Lock down accessories
Blower assembly
Ar-Laser: 30mW
Power supply: 208V, 60Hz, 17A
1995 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a sophisticated wafer testing and metrology equipment designed for a variety of research and production applications. It offers unparalleled accuracy and repeatable results that allow users to measure the size, shape and depth of features on a wafer's surface with unparalleled precision. The system utilizes an innovative dual-beam laser interferometer to provide electro-optical measurements with nanometer-level resolution. It is capable of measuring features such as pits, bumps, scratches, corrosion, steps, burrs and other irregularities in nanometer-level detail. The unit offers an automatic pass/fail evaluation capability that determines the depth, size, and shape of features on a wafer's surface within milliseconds, allowing for efficient workflow and time-saving results. KLA 6200 Surfscan is designed for high speed operation and is capable of full wafer scanning in a matter of seconds. It is equipped with a wide range of hardware and software tools which are designed to allow users to analyze their data quickly. The machine includes a host PC, a VME-based controller board, and a Surfscan 5200 temperature-controlled wafer inspection chamber. It also includes advanced imaging and analysis algorithms designed to provide accurate results with minimal manual input. TENCOR 6200 Surfscan also features an automatic scan feature which allows for scanning over large areas quickly. It also provides a wide range of image and data analysis functions which make it easy for users to review and analyze information in real-time. The tool is compatible with many industry standard CAD systems and metrology software packages which allows for the easy integration of data and results into existing products and services. PROMETRIX 6200 Surfscan is revered as one of the leading wafer testing and metrology systems available on the market today. Its combination of speed, accuracy, and repeatability make it an ideal asset for a variety of research and production applications. With its advanced hardware and software capabilities, it is capable of delivering precise and reliable results with minimal manual input. This makes 6200 Surfscan a premier choice for wafer inspections.
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