Used KLA / TENCOR 6200 #293610590 for sale

KLA / TENCOR 6200
ID: 293610590
Inspection system.
KLA / TENCOR 6200 is an advanced wafer testing and metrology equipment designed for the semiconductor industry. It provides automated critical dimension measurements and optical inspection with unparalleled accuracy and repeatability. KLA 6200 utilizes advanced optical technology, including a highly precise interferometric microscope equipped with a fully automated, XYZ linear drive. This drive enables precise measurements of coordinates, feature heights, overlay, and critical dimensions. The system also includes a high-power laser light source and high-resolution vertical and lateral scanning. This combination of features allows for extremely precise measurements and quantitative analysis of semiconductor structures. TENCOR 6200 is also equipped with an advanced intelligence package that provides automated defect detection and classification. This powerful technology can accurately identify instances of asymmetry, irregular geometry, excessive height, and other commonly encountered flaws. 6200 also features a suite of wafer testing capabilities. It offers a range of automated test methods, including on-line 4-point probe, CDC (chip-dependent characterization), and SOT (scan-on-test). The unit provides fast, accurate measurements of device characteristics with the highest levels of repeatability and sensitivity. In addition, KLA / TENCOR 6200 provides enhanced wafer inspection capabilities. It offers automated characterization of semiconductor defects, including die-by-die defect review with defect classification, detection of microscopic defects, analysis of pattern registration, and automated flat field focus. In sum, KLA 6200 is an advanced machine for semiconductor metrology and wafer testing. It offers enhanced optical technology and automated intelligence features, including precision measurements, automated defect identification, and a range of wafer test capabilities. The tool provides semiconductor manufacturers with a reliable, cost-effective solution for quality assurance and process control.
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