Used KLA / TENCOR 6200 #64476 for sale

KLA / TENCOR 6200 is a wafer testing and metrology equipment that is designed to provide rapid process monitoring and fast data analysis. KLA 6200 is an automated system capable of measuring the surface and thickness properties of wafers, processing large volumes of data, identifying anomalies and sorting and tracking multiple samples. The unit has a wafer support platform, the Cassette and Loader, where the wafers are loaded and unloaded. TENCOR 6200 is equipped with a number of metrology tools including white light interferometer (SLIM), scatterometry, optical reflectometry, scatterphotometry, and 3D surface profilers. The SLIM works with an atmospheric pressurization to reduce the risk of contamination from the atmosphere on the wafer surface. Additionally, 6200 can perform both non-contact and contact metrology. For data analysis and status monitoring, KLA / TENCOR 6200 is integrated with KLA IntelliWafers software. IntelliWafers is a suite of integrated software applications designed to prepare, analyse and report on wafer inspection data. It provides a comprehensive set of features including the ability to perform automated statistical analysis of process wafers, as well as real-time process monitoring. IntelliWafers can generate reports and data plots that provide insight into critical process metrics, as well as trends in process variations and anomalies. In terms of throughput, KLA 6200 can test up to 300 pieces per hour. It can also be easily integrated into a variety of other systems, both in-line and off-line. Additionally, it can be configured to meet the demands of various applications, including the testing of high aspect ratio wafers. In summary, TENCOR 6200 is a highly efficient wafer testing and metrology machine that can provide rapid process monitoring, fast data analysis and comprehensive reports. Its wide array of features makes it suitable for a variety of applications and its high-speed throughput allows it to quickly process large volumes of data. Lastly, the tool is integrated with IntelliWafers software, which ensures automated statistical analysis, real-time process monitoring and comprehensive data analysis.