Used KLA / TENCOR 6210 Surfscan #9412434 for sale
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KLA / TENCOR 6210 Surfscan machine is a high end wafer testing and metrology equipment used in the semiconductor industry. The system allows for the accurate measurement of critical process details on wafers such as the uniformity of surfaces and geometrical parameters in the micron range. It is capable of acquiring accurate data on these parameters even at the very early stages of device fabrication in order to ensure process speed and fidelity. KLA 6210 Surfscan uses high resolution triangulation-based optical metrology technology to measure both across-wafer and within-die properties with great accuracy. This unit is designed for non-contact, high throughput, repeatable, and reliable operation. The accuracy of the readings generated by the machine is ensured thanks to the lateral scanning capability of the machine, along with high fidelity cameras, optics, and illumination systems. Additionally, the machine provides the flexibility to easily perform a variety of metrology measurements with no user intervention. In order to ensure the highest accuracy measurements, TENCOR 6210 Surfscan is designed with a laser interferometry tool. This asset is capable of measuring very small changes in the surface of the wafer as small as 0.1 nanometers. The scanning velocity is also adjustable and can vary from 0.25 to 7 mm/s while maintaining excellent accuracy. This makes it more convenient to measure fast moving wafer surfaces. The data collected by the model is used in the characterization and optimization of various semiconductor processes as well as for automated defect classification. The readouts from the equipment also enable failure analysis, which helps in improving the process flow and reducing cost. 6210 Surfscan is also designed for ease of connectivity, allowing for integration with other systems for easy manipulation of the data. The machine also has a user-friendly software interface which provides an intuitive workflow. In conclusion, KLA / TENCOR 6210 Surfscan wafer testing and metrology system is a powerful tool which allows for accurate and reliable measurements of wafer surfaces, even at the very early stages of device fabrication. The machine also includes a laser interferometry unit which allows for accurate measurement of very small changes in the surface of the wafer. Additionally, the easy connectivity and user-friendly software interface make it easy to integrate with other systems and make use of the collected data.
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