Used KLA / TENCOR 6220 Surfscan #139951 for sale

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ID: 139951
Wafer Size: 4" - 8"
Vintage: 1996
Inspection system, 4" - 8" Specifications: Sensitivity: 0.09 ㎛ at > 80% Capture rate ( latex spheres on bare silicon ) Throughput: 100 wph ( 200mm wafers ) at 0.12㎛ Repeatability: Within 0.5% δ ( Mean count >500, 0.364㎛ diameter latex spheres Illumination: Source: 30mW Argon-Ion Laser, 488nm Sample Sizes : 100mm to 200mm ( smaller sizes upon request ) round or square samples Configuration: Wafer Size: 100mm ~ 200 mm Power: 208V, 17A, 1Phase,60Hz Main Frame: CRT Monitor Keypad Mouse FDD Cassette plate System Controller Card Cadge . Slot 1 Video Card . Slot 2 N/A . Slot 3 CPU Board . Slot 4 Timing Generator Board . Slot 5 Haze Separator Board . Slot 6 Particle Area Processor Board . Slot 7 N/A . Slot 8 GPIO Board . Slot 9 Motor Controller Board . Slot 10 SECS Board . Slot 11 Ethernet Card . Slot 12 N/A . Slot 13 N/A HDD ( -2-EA ) Laser Power Supply Uniphase Laser ( 2214-30SLT ) Mainn Cucirt Breaker Cassette Plate Currently stored in a warehouse 1996 vintage.
KLA / TENCOR 6220 Surfscan is an automated wafer testing and metrology equipment designed to enable faster and more reliable processing of semiconductor wafers. It has the capacity to measure a large range of wafer parameters including surface and sub-surface film thickness, flatness, surface texture, peak-to-valley, surface reflectivity and the presence of imperfections. The system offers the ability to measure up to 20 wafers per hour utilizing three-dimensional, low-force light sensing heads. KLA 6220 Surfscan unit is constructed with a durable, corrosion-resistant housing that is designed to reliably handle the most challenging measurements. The structure of the machine is modular and provides the flexibility to configure it to the user's needs. It also features advanced hardware and software components to ensure high-precision measurements. The tool operates through the optical principles of short pitch interference, where vacuum-generated interference of laser beams probes the subsurface layers of the wafer before reflecting back to the photodetector for analysis. This not only measures surface and sub-surface film thickness with accuracy up to 5 nm, but also inspects for defects, including those below the surface of the wafer. The asset's graphical user interface (GUI) is intuitive and provides users with a range of metrics from real-time measurements. This information can then be used as feedback to make informed decisions about the parameters settings and performance of the wafer fabrication process. TENCOR 6220 Surfscan is an automated, robust wafer testing and metrology model suitable for a range of production environments. It is designed to reduce process time and improve product quality by providing faster, more reliable, and more accurate testing of multiple wafers simultaneously. As such, it is an ideal solution for those seeking an efficient, reliable, and cost-effective wafer testing solution.
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