Used KLA / TENCOR 6220 Surfscan #158592 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 158592
Wafer Size: 8"
Vintage: 1996
Non-patterned wafer inspection system, 8" Can accommodate wafers from diameter, 2"-8" Sensitivity-particle: 117 Micro-meter diameter Latex spheres with >90% capture rate Haze: 1 ppm Minimum Cassette to cassette handling Defect sensitivity: 0.09 um dia PSL Sphere equivalent with greater than 80% capture rate Haze: Sensitivity: 0.02 ppm Minimum Resolution: 0.002 ppm Repeatability: Count repeatability error less than 0.5 percent at 1 standard deviation Throughput: 100 WPH (200 mm) at 0.12 um Contamination: Less than 0.005 particles/cm² greater than 0.15 mm dia per single pass Illumination source: 30mW Cassette handling: Single puck wafer handling from two cassettes (One sender / Receiver, one receiver) Electrical requirements: 200-240V, 50/60 Hz, 2 kVA 1996 vintage.
KLA / TENCOR 6220 Surfscan is a next-generation wafer testing and metrology equipment designed to support the semiconductor industry's increased needs for accurate, reliable, and repeatable metrology. The sleek design of KLA 6220 Surfscan allows for large wafer handling and high-level throughput, while a reduction in the number of parts, components, and services required support the ultimate goal of cost-cutting and improved efficiency. Equipped with a dual-axes optical system and an ultra-precise motion stage, TENCOR 6220 Surfscan provides dynamic live imaging of wafer surfaces with a high degree of spatial resolution. The unit includes an intuitive, customizable touch user interface, as well as a comprehensive library of automated analysis algorithms to ensure that measured results are accurate and repeatable. To accommodate various requirements, 6220 Surfscan can handle a variety of test, metrology, and imaging tasks with a high level of accuracy and precision. The metrology machine can measure multiple layers or different materials with a single scan, as well as collect 3D information on the wafer surface using advanced Fourier-Transform Profilometry (FT-PROF). Additionally, KLA / TENCOR 6220 Surfscan features an integrated calibration tool, as well as a comprehensive suite of metrology tools to enable comprehensive characterization and analysis of almost any surface on the wafer with a high degree of accuracy. KLA 6220 Surfscan is designed to provide the necessary performance to characterize and measure complex surfaces, semiconductor devices, and other microelectronic components. The asset includes a wafer loading module, as well as a high-precision motion stage that allows for precise and repeatable scanning of wafer surfaces. The software package offers advanced image acquisition, image processing, and analytical capabilities, while supporting a variety of applications, such as component and device characterization, failure analysis, and feature resolution. The model is capable of accurately measuring multiple layers or different materials in a single scan, as well as performing advanced imaging tasks, such as feature recognition and analysis, to reduce time-consuming manual inspection and maximize productivity. In summary, TENCOR 6220 Surfscan is a powerful and versatile wafer testing and metrology equipment that offers exceptional performance to accurately and reliably measure the features of microelectronic components and surfaces in a single scan. The intuitive user interface and precise motion stage of 6220 Surfscan provide high-level throughput and flexibility, while the advanced imaging and analytical capabilities ensure reliable, repeatable, and accurate results.
There are no reviews yet