Used KLA / TENCOR 6220 Surfscan #188564 for sale
Wafer Size: 8"
Non-patterned Wafer Inspection System, 8" Load port type: dual open cassette Chuck: 6"-8", can be converted to 5" Environmental requirements Vacuum: 508 mmHg Ducted Venting: (2) 102 mm exhaust hose Environment: Class 10 or better 200-240 V, 50/60 Hz, 2 kVA.
KLA / TENCOR 6220 Surfscan Wafer Testing and Metrology equipment is a highly advanced and sophisticated tool that is specifically designed to measure and inspect the topography of wafers and other devices. It uses interferometry to measure the height of a surface with extremely high accuracy and precision. It can be used for a variety of applications including the characterization of surfaces on semiconductor devices and wafers, exploration of new materials, and instruction validation and comparison of manufacturing processes. KLA 6220 Surfscan system is capable of measuring extremely small features with high precision and accuracy. It uses a tilt corrected interferometer and a digital autocollimator to create an interference pattern of the scanned surface that is then used to accurately measure the exact heights. It has four tilt compensated measurement configurations to account for variations in the topography of the sample surface. The unit is equipped with high-speed scanning capability and can take samples at 12,000 cross-sectional points of data per second, which is essential for ensuring crisp and accurate measurement results. This machine can also be used to analyze different types of features and surfaces, such as conducting films, coatings, wear features, wear surface profiles, and thickness variations. Additionally, the tool is capable of measuring; sub-10nm feature sizes, pitch motion, its non-contact measurement and environmental immunity against temperature, vibration and air pressure. It also features an Autofocus Wizard that can automatically adjust the focus of the asset for any given surface and can even detect the presence of contaminants on the sample surface. TENCOR 6220 Surfscan also has an easy to use graphical user interface that helps to navigate the model and allow users to customize their measurements to their specific requirements. As an added bonus, this equipment has a built in thermal management system that actively monitors internal temperatures and optimizes the unit's performance. This is important because it ensures that the machine will produce precise and reliable results. Overall, 6220 Surfscan is a powerful and sophisticated wafer testing and metrology tool that is perfectly suited for applications that require reliable and accurate measurements of highly detailed physical surface profiles. From inspecting and analyzing wafer surfaces to conducting precise measurements of wear features and films, this asset is capable of performing a wide range of complex and detailed measurements with ease.
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