Used KLA / TENCOR 6220 Surfscan #197891 for sale

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KLA / TENCOR 6220 Surfscan
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ID: 197891
Non-patterned wafer inspection system.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed for use in semiconductor manufacturing. It is capable of measuring multiple types of electrical and physical properties on a variety of wafer types, such as silicon, gallium arsenide, and compound semiconductors. The system consists of wafer handling hardware which is used to move the wafers through the process, and an optical imaging unit which is used to detect, characterize, and measure defects on the wafer surface. The optical machine consists of an image capture tool which captures the image of the wafer and a metrology asset which analyzes the image. The image is assessed for artifacts and defects such as particles, pits, and steps. Additionally, features such as feature edges and feature size can also be measured. The model is capable of sensing and measuring features down to 100nm on a 200mm wafer, and is primarily used for device process development and process monitoring. The equipment is highly configurable, with options for both scanner and analyzer configuration, as well as several automated kernels and databases for defect recognition and analysis. Additionally, the system gives the user the ability to customize automated algorithms for a variety of process requirements. KLA 6220 Surfscan provides several advantages to the user including high accuracy and resolution, flexible operation, efficient automation, and reliable measurements. The unit operates in both manual and automated operation modes, and can provide measurements in standard formats such as double exponential steps and binary files. The machine also has several automated features that allow it to run efficiently and with minimal user intervention, such as automated stacking, surface feature identification, automatic defect classification, and automatic defect inspection. In conclusion, TENCOR 6220 Surfscan is an advanced wafer testing and metrology tool that is capable of providing accurate, reliable measurements on a wide variety of wafer types. The asset is highly configurable and automated, making it a great choice for process development and process monitoring in the semiconductor industry.
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